Sputter II – AJA Orion Sputter System

  • Two 3″ and two 2″ diameter sputter guns in sputter up configuration
  • 4″ substrate holder with heater up to 850 C
  • 6″ substrate holder with heater up to 400 C
  • DC, Pulse, and two RF Power Supplies
  • Substrate rotation with +/- 2.5% film thickness uniformity
  • Substrate bias
  • Turbo pump backed by a dry roughing pump

Training Manual: Sputter II – AJA Orion