clean room

Materials Science and Engineering

Biology and Medicine

Photonics and Quantum Physics

Advanced Sensors, Devices and Nano-Systems

New Technology Development

Acknowledgement Statement for Publications

This work utilized Northwestern University Micro/Nano Fabrication Facility (NUFAB), which is partially supported by Soft and Hybrid Nanotechnology Experimental (SHyNE) Resource (NSF ECCS-1542205), the Materials Research Science and Engineering Center (NSF DMR-1720139), the State of Illinois, and Northwestern University.