Stylus Profilometer – Veeco Dektak-8

  • Performs contact-based 2D or 3D topography measurement to characterize film thickness, roughness, stress and defects on samples up to 200mm
  • Delivers 262 um vertical range with 1 Å vertical resolution at 6.55 um range
  • Has Step Height Repeatability of 7.5 Å step, 1 sigma
  • Allows Maximum sample thickness of 25.4mm

Training Manual: Stylus_Profilometer_Veeco_Dektak-8