3D Optical Profiler – Zygo

  • Z precision: less than 1nm
  • Objective lens: 5X, 10X, 50X
  • Zoom lens: 1X, 1.5X, 2X
  • Auto Light, Auto Focus, Focus Aid and Auto Tilt available
  • Multi scan length from 5 um to 145 um
  • Extended scan length available
  • Advanced analysis tool
  • Remote control of objective lens switching
  • Joy stick control of stage: X, Y, Pitch and Roll

3D Optical Profiler

Training document: 3D_Optical_ProfilerZygo