Maskless Aligner – Heidelberg MLA150

  • Non contact
  • Topside and backside alignment
  • Minimum Feature Size: 1 micron
  • 375 nm and 405 nm exposure with LED lasers
  • Write Speed: 9 minutes for 100 mm x 100 mm area
  • Maximum Write Area: 150 mm x 150 mm
  • Gray scale exposure mode with 256 intensity levels
  • Conversion software for DXF, CIF, GDSII, and Gerber files for binary exposures; and BMP, and ASCII files for gray scale

Training Manual: MLA150