Thermal Evaporator – Denton Vacuum Explorer 14

  • Wafer size: Up to 150 mm
  • Cryp pump and dry roughing pump
  • Three shielded sources with 2 kVA power supply
  • Substrate heating (200 C) and rotation

Thermal Evaporator - Denton

Training Manual: Thermal_Evaporator_Denton_Vacuum_Explorer14