Sputtering – AJA Orion Sputter

  • Three 3″ diameter sputter guns in sputter up configuration
  • 4″ substrate holder with heater up to 850 C
  • 6″ substrate holder with heater up to 400 C
  • DC, Pulse, and RF Power Supplies
  • # Substrate rotation with +/- 2.5% film thickness uniformity
  • Substrate bias
  • Turbo pump backed by a dry roughing pump

Sputtering AJA Orion Sputter

 

Training Manual: AJA_Orion_Sputter_10212015