Rapid Thermal Processor – AW-610

  • Wafer Size: 3”, 4”, and 6” diameter (pieces can be processed)
  • Ramp up rate: Programmable, 10 ºC to 200 ºC per second
  • Ramp down rate: Programmable, 10 ºC to 125 ºC per second
  • Operating temperature: 150 ºC – 1100 ºC
  • Gases supplied: H2/N2, O2, Ar, N2
  • Thermocouple temperature accuracy: ±0.5 ºC
  • Pyrometer temperature accuracy: ±1 ºC
  • High wafer-to-wafer repeatability

Thermal Processor

Training Manual: Thermal_Processor_AW-610_Rapid_Thermal Processor_Allwin21Corp