E-beam Evaporator – AJA

  • Automatic operation: Auto pump, auto deposition and auto vent
  • Single and multilayer deposition via Inficon SQC310 controller
  • Accommodates substrates up to 6” in diameter
  • Substrate heating up to 200° C.
  • Substrate rotation
  • Water cooled substrate holder
  • Adjustable source-substrate distance (17”-20”)
  • Six pocket Temescal e-beam source (15 cc pockets)
  • 6 kW FerroTech Power Supply
  • Cryo pump and dry roughing pump
  • Base vacuum 2 x 10-7 Torr or better

E-beam Evaporator - AJA

Training Manual: E-beam_Evaporator_AJA